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FOI Corp. provides research and development of semiconductor equipment. The company's products include SE-3000 Oxide film etching system, VA series, ME series, PFT-M Plasma display inspection system, RENA Cleaning equipment, and Ashing system series. It was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. researches and develops semiconductor equipments. Its products include Etching System, STELLA fully supports FA (GEM, GEM300), Light Etching System, Rydeen-6800 fully supports FA (GEM), Rydeen-10000 fully supports FA (GEM, GEM300), Rydeen-5200 and Rydeen-7000, Surface Oxynitridation System and XORS fully supports FA (GEM, GEM300). The company was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. provides research and development of semiconductor equipment. The company's products include SE-3000 Oxide film etching system, VA series, ME series, PFT-M Plasma display inspection system, RENA Cleaning equipment, and Ashing system series. It was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. researches and develops semiconductor equipments. Its products include Etching System, STELLA fully supports FA (GEM, GEM300), Light Etching System, Rydeen-6800 fully supports FA (GEM), Rydeen-10000 fully supports FA (GEM, GEM300), Rydeen-5200 and Rydeen-7000, Surface Oxynitridation System and XORS fully supports FA (GEM, GEM300). The company was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. provides research and development of semiconductor equipment. The company's products include SE-3000 Oxide film etching system, VA series, ME series, PFT-M Plasma display inspection system, RENA Cleaning equipment, and Ashing system series. It was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. researches and develops semiconductor equipments. Its products include Etching System, STELLA fully supports FA (GEM, GEM300), Light Etching System, Rydeen-6800 fully supports FA (GEM), Rydeen-10000 fully supports FA (GEM, GEM300), Rydeen-5200 and Rydeen-7000, Surface Oxynitridation System and XORS fully supports FA (GEM, GEM300). The company was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. provides research and development of semiconductor equipment. The company's products include SE-3000 Oxide film etching system, VA series, ME series, PFT-M Plasma display inspection system, RENA Cleaning equipment, and Ashing system series. It was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.

FOI Corp. researches and develops semiconductor equipments. Its products include Etching System, STELLA fully supports FA (GEM, GEM300), Light Etching System, Rydeen-6800 fully supports FA (GEM), Rydeen-10000 fully supports FA (GEM, GEM300), Rydeen-5200 and Rydeen-7000, Surface Oxynitridation System and XORS fully supports FA (GEM, GEM300). The company was founded by Yutaka Okumura on October 17, 1994 and is headquartered in Kanagawa, Japan.